- ・ The only metal membrane filter in the world to use stainless steel short fibers.
- ・ Achieves low pressure loss and high particle exclusion.
- ・ Suited to flow less than 100 SLM, useable for various process gases.
NASclean is a thin-layer metal membrane filter made from sintered micron scale stainless steel short fibers (SUS316L). We take the product from a filter media (stainless steel short fibers) all the way to the final product, a gas filter used in the production of products such as semiconductors, flat panel displays, and solar panels.
（304KB）
- ・ Through pleating the filter media's shape, low pressure loss is achieved even with high flow volume.
- ・ Since it's all metal, high temperature baking is possible.
- ・ Capable of dealing with flow up to 3000 Nm3/h.
- ・ Component protection filters for MFC, valves, regulators, and more.
- ・ Depending on application, it's possible to choose between a low pressure type and a high pressure type.
- ・ Can be installed into existing pipes.
- ・ Filters for integrated gas panels, compatible with 1.125W-Seal, 1.125C-Seal, 1.5W-Seal.
- ・ Miniaturized through use of pleated-type media.
- ・ Through use of mechanical seals, the media part's composition requires no welding.
- ・High speed venting is possible through use of pleated-type media.
- ・Contributes to product yield rate via preventing the rise of particles.
- ・Design based on various chambers space is possible.
