Stainless Steel Fabric Filter Semiconductor Gas Filter (Trademark name: NASclean)

Semiconductor Gas Filter (Trademark name: NASclean)
Features of NASclean
F eatures of NASclean NASclean is a thin-layer metal-membrane filter sintered newly-developed stainless steel short fiber (its diameter: 1µm x its length: 10µm). Both the complete removal of particles bigger than 0,003µm and excellent gas replacement characteristics were accomplished.
1. Excellent particle removal performance.
2. Low pressure loss.
3. Good rectifying effect.
4. Excellent out- gas characteristics.
5. Excellent gas replacement characteristics.
6. Fume-free welding.
7. Guaranteed performance.
8. Meeting broad needs from low flow to high flow to large flow.

Major application
Filter for bulk gas and specialty gas on semiconductor manufacturing.
Protection of regulator, mass flow controller, flow meter, valve, etc.
Slow vent filters for load lock chamber using the rectification performance.
Comparison of flow characters between NASclean and conventional gas filters
image graph image
image
Applicable fields of NASclean
image
Semiconductor makers
Machine makers
Gas makers
Equipment makers

Specifications
IN LINE FILTERS    CATALOGUE [CHINESE] [KOREAN]
 
  Model Name Flow Rate Fitting Overall Length
LOW FLOW TYPE M-1 1SLM 1/4 VCR L3.3in L1.7in
M-3 3SLM ditto ditto L1.7in
M-5 5SLM ditto ditto ditto
N-10 10SLM ditto ditto L2.2in
N-30 30SLM ditto ditto ditto
N-50 50SLM ditto ditto  
N-100 100SLM 3/8 VCR L5.3in  
  *Filter Media: 316Lss, Ni
 
  Model Name Flow Rate
HIGH FLOW TYPE N-10M 10Nm3/Hr
N-20M 20Nm3/Hr
N-30M 30Nm3/Hr
N-40M 40Nm3/Hr
N-50M 50Nm3/Hr
N-100M 100Nm3/Hr
N-200M 200Nm3/Hr
N-500M 500Nm3/Hr
N-1000M 1000Nm3/Hr
N-2000M 2000Nm3/Hr
  *Filter Media: 316Lss
GASKET FILTERS    CATALOGUE [CHINESE] [KOREAN]
 
  Model Name Accuracy Flow Rate Fitting
HIGH PRESSURE TYPE
(~2,200PSI) 		GF-T001 0.003µm 5SLM 1/4VCR
GF-T03 0.3µm 25SLM 1/4VCR
LOW PRESSURE TYPE
(~145PSI)		 GF-D03N 0.3µm 25SLM 1/4VCR
GF-DIN 1.0µm 50SLM 1/4VCR
GF-D03L 0.3µm 70SLM 3/8VCR
  *Filter Media: 316Lss, Ni
 Gasket: 316Lss, Ni
HIGH SPEED VENT FILTERS: Custom-made products for different load lock chamber
         CATALOGUE [CHINESE]

| Introduction of Stainless Wires | Introduction of NASLON (Metal Fiber) |
| Introduction of Other Processed Products |
Return to the top
.
Please feel free to contact semicon@n-seisen.co.jp for further information of NASclean.