- ・The only metal membrane filter in the world to use stainless steel short fibers.
- ・Achieves low pressure loss and high particle exclusion.
- ・Suited to flow less than 100 SLM, useable for various process gases.
NASclean is a thin-layer metal membrane filter made from sintered micron scale stainless steel short fibers (SUS316L). We take the product from a filter media (stainless steel short fibers) all the way to the final product, a gas filter used in the production of products such as semiconductors, flat panel displays, and solar panels.
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- ・Through pleating the filter media’s shape, low pressure loss is achieved even with high flow volume.
- ・Since it’s all metal, high temperature baking is possible.
- ・Capable of dealing with flow up to 3000 Nm3/h.
- ・Component protection filters for MFC, valves, regulators, and more.
- ・Depending on application, it’s possible to choose between a low pressure type and a high pressure type.
- ・Can be installed into existing pipes.
- ・Filters for integrated gas panels, compatible with 1.125W-Seal, 1.125C-Seal, 1.5W-Seal.
- ・Miniaturized through use of pleated-type media.
- ・Through use of mechanical seals, the media part’s composition requires no welding.
- ・High speed venting is possible through use of pleated-type media.
- ・Contributes to product yield rate via preventing the rise of particles.
- ・Design based on various chambers space is possible.
